Mechanical Resonant Pump

ABSTRACT

Provided herein is a mechanical resonant system, comprising a frame; at least one pump disposed on the frame; one or two masses coupled to the frame by a first plurality of resilient members; and at least one voice coil actuator disposed within the frame and coupled to the at least one pump or to the one or two masses; wherein when the system comprises two masses, a second plurality of resilient members couple the masses to each other. Also provided are methods for using these mechanical resonant systems to evacuate a chamber, to compress air, or sense changes in pressure.

This application claims the benefit of the filing date as a divisionalof the U.S. patent application Ser. No. 16/541,389, filed on Apr. 6,2020, which claims the benefit of priority of U.S. Provisional PatentApplication Ser. No. 62/829,829 filed Apr. 5, 2019, the disclosure ofwhich is incorporated by reference in its entirety for all purposes.

Vacuum pumps and compressors are notoriously inefficient, loud andvibrate. Previous attempts to use mechanical resonant systems to reducethis noise and vibration have been unsuccessful, partly because thesystems were only partially resonant and relied only upon the pistonpressure for the spring, which itself is non-linear and subject to loss.

The system disclosed herein solves these problems by providing a moreefficient vacuum pump, which saves money and makes power loads onmachines easier to meet. The disclosed systems permit larger inlet portsusing a larger piston, cancel the forces to the frame and ultimately theground. In several embodiments, two masses move out of phase of oneanother. Spring rates are sized to reduce the net force to or near zerothat is transmitted to the frame and ultimately to the ground. Incertain embodiments, the system comprised multiple pump heads, forexample to obtain high vacuum and quick compression in a compressorapplications. In this embodiment, the system is a multiple stage pumpingsystems.

The present disclosure provides a mechanical resonant system,comprising: a frame; at least one pump disposed on the frame; one or twomasses coupled to the frame by a first plurality of resilient members;and at least one voice coil actuator disposed within the frame andcoupled to the at least one pump or to the one or two masses; whereinwhen the system comprises two masses, a second plurality of resilientmembers couple the masses to each other. In certain embodiments, thevoice coil actuator comprises a bobbin, a magnet, and a magnet housing;the pump comprises a pump head, piston, and barrel; the piston isdisposed within the barrel and beneath the pump head; and the piston iscoupled to one of the bobbin or the magnet housing. In certainembodiments, the system has a resonance frequency and on resonance theinput force is on phase with of the velocity of the one or two masses.

The present disclosure also provides a mechanical resonant systemcomprising a frame comprising a plurality of plates and a plurality ofstandoffs; at least one pair of pumps disposed on opposite sides of theframe; two masses operatively coupled to the frame by a first pluralityof resilient members; a second plurality of resilient members couplingthe two masses to each other;

and at least one voice coil actuator within the frame and coupled to theat least one pump or the one or two masses.

In certain embodiments, the at least one voice coil actuator is disposedbetween and coupled to each of the at least one pair of pumps. Incertain embodiments, the at least one voice coil actuator comprises abobbin, a magnet, and a magnet housing; each of the at least one pair ofpumps comprises a pump head, piston, and barrel; each piston is disposedwithin each barrel and beneath each pump head; and the piston of onepump is coupled to the bobbin and the piston of the other pump iscoupled to the magnet housing. In certain embodiments, the systemfurther comprises a third plurality of resilient members disposedbetween the frame and ground, whereby the frame functions as a thirdmass in the system.

The present disclosure further provides a method for evacuating achamber, comprising operating a mechanical resonant system describedherein in fluid communication with the chamber. In certain embodiments,the system comprise one pair of pumps disposed on opposite sides of theframe, wherein one pump pulls and the other pump pushes. In certainembodiments, during operation the system has a resonance frequency, and,on resonance, the input force is on phase with of the velocity of theone or two masses.

The present disclosure also provides a method for compressing air,comprising operating a mechanical resonant system described herein.

Additional embodiments and features are set forth in part in thedescription that follows, and in part will become apparent to thoseskilled in the art upon examination of the specification, or may belearned by the practice of the embodiments discussed herein. A furtherunderstanding of the nature and advantages of certain embodiments may berealized by reference to the remaining portions of the specification andthe drawings, which forms a part of this disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosure will be readily understood by the following detaileddescription in conjunction with the accompanying drawings, wherein likereference numerals designate like structural elements. The drawingsprovide exemplary embodiments or aspects of the disclosure and do notlimit the scope of the disclosure.

FIG. 1 depicts a plan view of the disclosed system with a first mass,with the moving mass and pump plunger in the center.

FIG. 2 depicts a cross-sectional view of the one-mass system of FIG. 1 .

FIG. 3 depicts a side view of the one-mass system of FIG. 1 .

FIG. 4 depicts a top view of the one-mass system of FIG. 1 .

FIG. 5 depicts a bottom view of the one-mass system of FIG. 1 .

FIG. 6 depicts a plan view of the disclosed system comprising first andsecond masses and first and second pumps, with the moving masses andpump pistons in the center.

FIG. 7 depicts a cross-sectional view of the two-mass system of FIG. 6 .

FIG. 8 depicts a side view of the two-mass system of FIG. 6 .

FIG. 9 depicts a top view of the two-mass system of FIG. 6 .

FIG. 10 depicts a bottom view of the two-mass system of FIG. 6 .

FIG. 11 depicts a plan view of the disclosed system with first, second,and third masses and first and second pumps, with the moving mass andpump plunger in the center.

FIG. 12 depicts a cross-sectional view of the three-mass system of FIG.11 .

FIG. 13 depicts a side view of the three-mass system of FIG. 11 .

FIG. 14 depicts a top view of the three-mass system of FIG. 11 .

FIG. 15 depicts a bottom view of the three-mass system of FIG. 11 .

FIG. 16 conceptually depicts a mechanical resonant system with one mass,one pump, and a voice coil.

FIG. 17 conceptually depicts a mechanical resonant system with twomasses, two pumps, and a spinning eccentric.

FIG. 18 conceptually depicts a mechanical resonant system with twomasses, two pumps, and a voice coil.

FIG. 19 conceptually depicts a mechanical resonant system with twomasses, four pumps, and a voice coil.

FIG. 20 plots the displacement of amplitude (inches) for the system asfunction of frequency (Hz) and the number of masses (1, 2 or 3).

FIG. 21 plots the phase angle of mass displacements relative to inputforce for one-mass and two-mass systems.

FIG. 22 plots the force transmitted through the springs of disclosedmechanical resonant systems measured in pounds force as a function offrequency (Hz).

FIG. 23 shows a testing schematic for systems disclosed herein. Theschematic comprises a signal generator, oscilloscope, amplifier, signalconditioner, current probe, voltage probe, accelerometer, and amechanical resonance system.

FIG. 24 shows the signals from an embodiment of the disclosed systemmeasured during testing using the schematic of FIG. 23 , including thefunction generator signal, the resultant acceleration response, voicecoil force (current-to-voice coil), and reference line at zero.

FIG. 25 shows power data from the test conducted in FIG. 24 on theschematic of FIG. 23 .

The present disclosure may be understood by reference to the followingdetailed description, taken in conjunction with the drawings asdescribed above. For illustrative clarity, certain elements in variousdrawings may not be drawn to scale, may be represented schematically orconceptually, or otherwise may not correspond exactly to certainphysical configurations of embodiments.

DETAILED DESCRIPTION

Provided herein is a system, used for example as a vacuum pump or ancompressor, wherein reciprocating action of the pump uses a mechanicalresonant system. The disclosed mechanical resonant system is the firstof its kind to cancel the forces within the system for a pumpingapparatus. The force cancellation of masses minimizes force to groundand conserves energy within the system. The system is also first of itskind to have multiple pump heads in the same system operating out ofphase of one another, such that a higher pumping rate can be attained,when one pump is pulling and the other pump is pushing.

Generally, the mechanical resonant system comprises springs 400 andmasses 200 arranged to cancel out the motion forces to ground. Addingmasses to a system typically increases input forces and increases powerto drive the system. The disclosed systems use resonance, whichsubstantially decreases the input force for a minimal increase in systempower input. The plurality of masses cancels the vibration forces toground for a single frequency and greatly reduces vibration of theframe. The plurality pistons within the pumps allows the system tofunction as a multiple stage compressor or vacuum pump.

Referring to FIGS. 1-5 , a mechanical resonant system 100 comprises aframe 300, a pump 110 disposed on the frame 300, a mass 200 coupled tothe frame 300 by a first plurality of resilient members 400, and a voicecoil actuator 500 disposed beneath and coupled to the pump 110. The pump110 is disposed in the center of the proximal end of the frame 300. Thepump 110 comprises a pump head 112 operatively coupled to a barrel 116containing a piston 114. The frame 300 comprises two plates 310,320joined together by a plurality of eight standoffs 350 evenly distributednear the periphery of the plates 310,320. Each standoff 350 is joined tothe first plate 310 with a pair of nuts 351,352 and to two the secondplate 320 with another pair of nuts 353,354. In certain embodiments, thestandoff 350 is coupled to a foot 359 at the distal end to aid contactwith ground 800.

Standoffs provide strength and rigidity to the system, such thatseparate resonant modes do not occur within the structure of the system.For instance, each mass 200 is assumed to be a rigid body and thestandoffs 350 ensure that each mass acts as rigid body during systemoperation. The number of standoffs in the plurality can be selected toaccommodate the size of the system, such as between 1 and 100, forexample 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 15, 20, 25, 30, 35, 40, 45, 50,75, or 100. That is, a large system typically contains more standoffsthan a smaller system to provide sufficient strength and rigidity. Eachstandoff 350 is matched with springs 410,420 and nuts 351,352,353,354,so as the number of standoff 350 increases so do the number of springsand nuts.

Referring again to FIGS. 1-5 , the mass 200 comprises a second massplate 221 disposed between the first frame plate 310 and second frameplate 320. Second mass plate 221 is coupled to first frame plate 310 bya plurality frame-to-mass springs 410. Second mass plate 221 is coupledto second frame plate 320 by a plurality of mass-to-frame springs 420.

The mechanical resonant systems disclosed herein comprise at least afirst plurality of resilient members 400. Suitable examples of resilientmembers include, but are not limited to, spiral springs, leaf springs,pneumatic springs, rubber springs, piezoelectric variable springs, andpneumatic variable springs. Generally, spring characteristics and massweights are chosen such that the resonant condition is achievable in themechanical resonant system 100. In certain embodiments, variableresilient members are substituted for springs to change the resonantfrequency. This substitution allows for a larger variability withoutsacrificing performance. Variable resilient members can be eithermechanically or electronically controlled. Suitable examples of suchvariable resilient members include, but are not limited to, air filledbellows, variable length leaf springs, coil spring wedges, piezoelectricbi-metal springs, and other members which can be used as a resilientmember which can have its spring rate changed or otherwise affected.

Mechanical resonant systems 100, such as air compressors and vacuumpumps, may comprise an actuator in the form of a voice coil todrive/operate the system. When present, for example as depicted in FIGS.1-5 , the voice coil actuator 500 comprises a bobbin 530, an electricalconductor and a magnet assembly. In this embodiment of the one-masssystem, the voice coil actuator 500 is disposed beneath and coupled tothe pump 110. Alternatively, the voice coil actuator 500 may be coupledto mass 200.

The electrical conductor is coupled to the bobbin 530. The magnet 510 iscoupled to magnet housing 520. At least a portion of the bobbin 530 andat least a portion of the electrical conductor are configured to bepositioned within a gap formed by the magnet 510 and the housing 520.The bobbin 530 and the magnet 510 are configured to oscillate when analternating current is applied to the electrical conductor. The pump 110is coupled to one of the bobbin 530 or the magnet housing 550.Alternatively, the mass 200 is coupled to one of the bobbin 530 or themagnet housing 550.

In some embodiments, the voice coil actuator 500 is a first voice coilactuator, and the system further comprises a second voice coil actuatorcoupled to one of the masses 200 and to one of the pistons 114. In someembodiments, the second voice coil actuator is configured to operate asa driver for the system by driving the mass 200 in phase with the firstvoice coil actuator. In other embodiments, the second voice coilactuator is configured to operate as a brake for the system by drivingthe masses 180° out of phase from the first voice coil actuator.

In certain embodiments, the mechanical resonant system 100 furthercomprises a cooling system coupled to the voice coil actuator 500. Insome embodiments, an opening is positioned along a longitudinal axis ofthe magnet 510. In some embodiments, the electrical conductor comprisesa plurality of coil wraps coupled to the bobbin 530. In someembodiments, the air flow is generated by oscillation of the bobbin 530and the magnet assembly. In some embodiments, the magnet assemblycomprises a first group of magnets coupled to the housing and a secondgroup of magnets positioned above the first group of magnets. The firstgroup of magnets is coupled to the second group of magnets by a guideshaft. In certain embodiments, a magnet from the first group of magnetsis arranged with its polarity opposite to the polarity of a magnet fromthe second group of magnets.

In some embodiments, the cooling system comprises a fan configured tocirculate the air flow. In other embodiments, the cooling systemcomprises a vibratory pumper flap configured to pump the air flow as thebobbin and the magnet assembly oscillate. In some embodiments, theactuator comprises a voltage-controlled amplifier configured to drivethe actuator. In other embodiments, the actuator comprises acurrent-controlled amplifier configured to drive the voice coilactuator.

In some embodiments, the bobbin material comprises a plastic material.In other embodiments, the bobbin material comprises a ferrite material.In some embodiments, the housing is made from a magnetically conductivematerial. Use of an electrically non-conductive bobbin can increasemechanical efficiencies to up to as much as 98% and can decrease theresistive heating, voltage and electrical current of the mechanicalresonant system 100. Furthermore, the electrically non-conductive bobbincan eliminate eddy current losses typically associated with electricallyconductive voice coil bobbins used in conventional resonant systems.Such eddy currents can cause significant heat energy and power loads onthe system which can affect the performance and useful life of thesystem.

Referring now to FIGS. 6-10 , this embodiment is a two-mass mechanicalresonant system 100 comprising a frame 300 comprising a plurality ofplates 310, 320, 330 and a plurality of standoffs 350. The first mass210, the second mass 220, and the frame 300 are each independentlymoveable with respect to one another.

The frame 300 comprises four plates 310,320,330,340 joined together by aplurality of eight standoffs 350 evenly distributed near the peripheryof the plates 310,320,330,340. Each standoff 350 is joined to the firstplate 310 with a pair of nuts 351,352, and to the second plate 320 witha pair of nuts 353,354, to the third plate 330 with a pair of nuts355,356, and to the fourth plate 340 with a pair of nuts 357, 358.

One pair of pumps 110,120 are disposed on opposite sides of the frame300. The first pump 110 comprises a pump head 112, a piston 114, and abarrel 116. The piston 114 is disposed within the barrel 116 and beneaththe pump head 112. The second pump 120 comprises a pump head 122, apiston 124, and a barrel 126. The piston 124 is disposed within thebarrel 126 and beneath the pump head 122.

Two masses 220 consist of two mass assemblies 210,220 and areoperatively coupled to the frame 300 by a first plurality of resilientmembers 400. The first mass assembly 210 comprises a first mass plate211, a first spacer 213, a first ring 214, a second spacer 215, a secondring 216, a first bolt 217, and a second bolt 219. The first mass plate211 is disposed beneath the first plate 310 and is coupled with thefirst bolt 217 to the first ring 214 by the first spacer 213. The firstring 214 is likewise coupled to the second ring 216 with a second bolt219 by a second spacer 215. First mass plate 211 comprises a pluralityof holes 218 to accommodate the passthrough of each standoff 350 fromframe 300. First mass plate 211 of the first mass assembly 210 iscoupled to first frame plate 310 by a plurality frame-to-mass springs410. First mass plate 211 of the first mass assembly 210 is coupled tosecond frame plate 320 by a plurality of mass-to-frame springs 420.

The second mass assembly 220 comprises a second mass plate 221. Thesecond mass plate 221 is coupled to the third mass plate 330 by aplurality of mass-to-frame springs 420. The second mass plate 221 iscoupled to the fourth mass plate 340 by a plurality of frame-to-masssprings 410. In certain embodiments, the second mass assembly 220comprises a second mass plate 221, a first spacer 223, a first ring 224,a second spacer 225, a second ring 226, a first bolt 227, and a secondbolt 229. In this embodiment, the second mass plate 221 is disposedbeneath the third plate 330 and is coupled with the first bolt 227 tothe first ring 224 by the first spacer 223. The first ring 224 islikewise coupled to the second ring 226 with a second bolt 229 by asecond spacer 225.

A second plurality of resilient members 430,440 couple the two massassemblies 210,220 to each other. Specifically, the first ring 214 ofthe first mass assembly 210 is coupled above the second mass plate 221by a plurality ring-to-mass springs 430. The second ring 216 of thefirst mass assembly 210 is coupled below the second mass plate 221 by aplurality of mass-to-ring springs 440.

A voice coil actuator 500 is disposed between and coupled to each ofpair of pumps 110,120. The voice coil actuator 500 comprises a bobbin530, a magnet 510, a magnet housing 520, a magnet housing bolt 540, anda magnet flex director 550. The piston 114 of the first pump 110 iscoupled to the bobbin 530 and the piston 124 of the second pump 120 iscoupled to the magnet housing 520.

For example, a mechanical resonant system 100 comprising two masses isvibrated between 162° and 198° out of phase of each other and arecoupled to ground or to another mass through a second plurality ofresilient members. The masses and resilient members are sized so thatthe forces transmitted to ground or another mass are minimized. Thetransmitted forces matched through the coupling springs by choosing aspring rate to transfer the displacement forces of the moving masses.The oscillations of the masses generate transmitted forces F(t) throughthe springs by the relation F(t)=k*x(t), where k is the spring rate andx(t) is the displacement of the mass with respect to time. The forcefrom Mass can be calculated from F₁(f_(Hz),t):=Z₁(f_(Hz))·sin(ω_(f)(f_(Hz))·t+ϕ₁(f_(Hz)))·k₂and the force from Mass 2can be calculated from F₂(f_(Hz),t) :32Z₂(f_(Hz))·sin(ω_(f)(_(fHz))·t+ϕ₂(f_(Hz)))˜k3, where Z₁ is thedisplacement amplitude of Mass 1, Z₂ is the displacement amplitude ofMass 2, and Φ1 and Φ2 are the phase angle offsets from the massdisplacements and the input force. The resultant force can be found bysumming F₁ and F₂ together and would be the resultant force to groundfor a two-mass system. See FIG. 22 .

The linear force applied to the first mass produces a vibratory motiontransmitted through resilient members to a second mass then to theframe. By adding a second mass, it is possible to tune the response ofthe system so that transmitted forces are cancelled out. The first andsecond masses are coupled together with resilient members to transferthe vast majority of the force to the pump and minimize the transmittedforce to the ground and supporting structure. Minimizing thetransmission of force to ground and maximizing the transmitted force tothe pump most efficiently affects work done and reduces wear. Mostefficient operation is achieved by operation at or near resonantfrequencies of the mechanism. Levels of intensity that are nearlyimpossible with conventional methods of pumping are attained with easeby employing the mechanical resonant system disclosed herein.

Operation at the resonant condition is not necessary to achieveevacuation or compression. Operation near resonance provides substantialamplitude and accelerations to produce significant pressuredifferentials. Operation is typically within 10 Hz of resonance. As thefrequency approaches the resonant condition, small changes produce largeresults (the slope of the curve-frequency vs. amplitude-changes rapidlyas the resonant condition is approached).

Referring to FIGS. 11-15 , in certain embodiments, the frame 300 acts athird mass 230 when coupled to ground by a plurality of resilientmembers 450. In this embodiment, the resultant force to ground istransferred through the additional spring and the resultant force toground is further reduced. To minimize the forces to ground, the systemoperates on the second resonant mode for a two-mass system and the thirdresonant mode for a three-mass system, where Mass 1 and Mass 2 thatvibrated between 162° and 198° out of phase of each other. Otherfeatures in the three-mass system correspond to those of the two-masssystem detailed above.

These principles are further illustrated at the conceptual drawings atFIGS. 16-19 . FIG. 16 conceptually depicts a mechanical resonant system100, comprising a frame 300, one mass 210, one pump 110 having a barrel116, a pair of springs 410, and a voice coil actuator comprising amagnet 510 and a bobbin 530. The pump 110 is disposed in the frame 300and is coupled to the mass 210 by the barrel 116. The mass 210 iscoupled to the bobbin 530 and to the frame 300 by the pair of springs410. The bobbin is coupled to the frame 300 by the magnet 510.

FIG. 17 conceptually depicts a mechanical resonant system 100,comprising a frame 300, two masses 210,220, two pumps 110,120, a pair offrame-to-mass springs 410, a pair of mass-to-frame springs 420, a pairof mass-to-mass springs 430, and a force function 600. The pump 110 isdisposed in the frame 300 and is coupled to the mass 210 by the barrel116. The first mass 210 is coupled to the force function 600, to theframe by a pair of frame-to-mass springs 410 and to the second mass 220by a pair of ring-to-mass springs 430. The second mass is coupled to theframe via a pair of mass-to-frame springs 420, and to the second pump120 by the barrel 126. The second pump is disposed in the frame 330opposite the first pump 110. The force function may be, for example, aspinning eccentric.

FIG. 18 conceptually depicts a mechanical resonant system 100,comprising a frame 300, two masses 210,220, two pumps 110,120, a pair offrame-to-mass springs 410, a pair of mass-to-frame springs 420, a pairof mass-to-mass springs 430, and a voice coil actuator comprising amagnet 510 and a bobbin 530. The pump 110 is disposed in the frame 300and is coupled to the mass 210 by the barrel 116. The first mass 210 iscoupled to bobbin 530, to the frame by a pair of frame-to-mass springs410 and to the second mass 220 by a pair of ring-to-mass springs 430.The bobbin 530 is coupled to the magnet 510. The second mass 220 iscoupled to the magnet 510, to the frame 300 via a pair of mass-to-framesprings 420, and to the second pump 120 by the barrel 126. The secondpump 120 is disposed in the frame 330 opposite the first pump 110.

FIG. 19 conceptually depicts a mechanical resonant system 100,comprising a frame 300, two masses 210,220, four pumps 110,120,130,140,a pair of frame-to-mass springs 410, a pair of mass-to-frame springs420, a pair of mass-to-mass springs 430, and a voice coil actuatorcomprising a magnet 510 and a bobbin 530. The pumps 110,120 are disposedin the frame 300 and are coupled to the mass 210 by the barrel 116 andthe barrel 126. The first mass 210 is coupled to bobbin 530, to theframe by a pair of frame-to-mass springs 410 and to the second mass 220by a pair of ring-to-mass springs 430. The bobbin 530 is coupled to themagnet 510. The second mass 220 is coupled to the magnet 510, to theframe 300 via a pair of mass-to-frame springs 420, to the third pump 120by the barrel 136, and to the fourth pump 140 by the barrel 146. Thethird pump 130 is disposed in the frame 330 opposite the first pump 110.The fourth pump is disposed in the frame 330 opposite the second pump120.

FIG. 20 plots the displacement of amplitude (inches) for the system asfunction of frequency (Hz) and the number of masses (1, 2 or 3). FIG. 21plots the phase angle of mass displacements relative to input force forone-mass and two-mass systems. FIG. 22 plots the force transmittedthrough the springs of disclosed mechanical resonant systems measured inpounds force as a function of frequency (Hz). The force of Mass 2through k3 is higher than the Force of Mass 1 through k2 below resonance(ω_(n)). The force of Mass 1 through k2 is higher than the Force of Mass2 through k3 above resonance (ω_(n)). In many embodiments, the operatingfrequency is typically between the −3 dB drop in power values on eachside of the resonant peak. The resultant −3 dB drop is calculated as thepeak value multiplied by sqrt(2)/2. For example, when the peak is 14.65lbf (pounds force), the −3 dB drop value is 10.36 lbf.

In certain embodiments, the system also acts as a sensor. Based on theresonant frequency of the system, the vacuum level can be calculated.For example, the resonant system dynamics change based on whether thesystem has a load. When the vacuum is being pulled, load is large. Oncethe vacuum has been achieved and there is no further pumping, the loadgoes to zero and the system dynamics change. The spring rate alsochanges as the vacuum is pulled, which causes the resonant frequency toshift.

Although the disclosure described herein is susceptible to variousmodifications and alternative iterations, specific embodiments thereofhave been described in greater detail above. It should be understood,however, that the detailed description of the composition is notintended to limit the disclosure to the specific embodiments disclosed.Rather, it should be understood that the disclosure is intended to coverall modifications, equivalents, and alternatives falling within thespirit and scope of the disclosure as defined by the claim language.

When introducing elements of the present disclosure or theembodiments(s) thereof, the articles “a,” “an,” “the,” and “said” areintended to mean that there are one or more of the elements. The terms“comprising,” “including,” and “having” are intended to be inclusive andmean that there may be additional elements other than the listedelements.

Having described the disclosure in detail, it will be apparent thatmodifications and variations are possible without departing from thescope of the disclosure defined in the appended claims.

EXAMPLES

The following examples are included to demonstrate certain embodimentsof the disclosure. It should be appreciated by those of skill in the artthat the techniques disclosed in the examples represent techniquesdiscovered by the inventors to function well in the practice of thedisclosure. Those of skill in the art should, however, in light of thepresent disclosure, appreciate that many changes can be made in thespecific embodiments that are disclosed and still obtain a like orsimilar result without departing from the spirit and scope of thedisclosure, therefore all matter set forth is to be interpreted asillustrative and not in a limiting sense.

TABLE 1 Reference numerals 100 system 110 first pump 112 pump head 114piston 116 barrel 120 second pump 122 pump head 124 piston 126 barrel130 third pump 132 pump head 134 piston 136 barrel 140 fourth pump 142pump head 144 piston 146 barrel 150 first washer 155 second washer 200masses 210 first mass assembly 211 first mass plate 212 notch 213 firstspacer 214 first ring 215 second spacer 216 second ring 217 first bolt218 hole 219 second bolt 220 second mass assembly 221 second mass plate222 notch 223 first spacer 224 first ring 225 second spacer 226 secondring 227 first bolt 228 hole 229 second bolt 230 third mass assembly 231mass plate 232 notch 233 first spacer 234 first ring 235 second spacer236 second ring 300 frame 310 first plate 320 second plate 330 thirdplate 340 fourth plate 350 standoff 351 first nut 352 second nut 353third nut 354 fourth nut 355 fifth nut 356 sixth nut 357 seventh nut 358eighth nut 359 foot 400 resilient members 410 frame-to-mass spring 420mass-to-frame spring 430 ring-to-mass spring 440 mass-to-ring spring 450frame-to-ground spring 500 voice coil actuator 510 magnet 520 magnethousing 530 bobbin 540 magnet housing bolt 550 magnet flex director 600force function 700 testing schematic 710 signal generator 720oscilloscope 730 signal conditioner 740 amplifier 750 current probe 760voltage probe 770 accelerometer 780 signal generator junction 781oscilloscope junction 782 amplifier junction 783 amplifier-to-currentprobe connector 784 current probe-to-oscilloscope connector 785 currentprobe-to-voltage probe connector 786 voltage probe-to-oscilloscopeconnector 787 oscilloscope-to-signal conditioner connector 788 signalconnector-to-accelerometer connector 789 voltage probe-to-systemconnector 800 ground

Example 1

A mechanical resonant system was built and configured as a vacuum pump.The pump used a vacuum pump head from a KNF UN838KNI Vacuum Pump. Themoving mass attached to the piston of the pump was designed as describedherein. When tested, it was shown that the system operated on and nearmechanical resonance.

FIG. 23 shows a testing schematic used, comprising a signal generator710, oscilloscope 720, amplifier 740, signal conditioner 730, currentprobe 750, voltage probe 760, accelerometer 770, and a mechanicalresonance system 100. FIG. 24 shows the signals from testing using thetesting schematic of FIG. 23 , including the function generator signal,the resultant acceleration response, voice coil force (current-to-voicecoil), and reference line at zero. On mechanical resonance theacceleration response was phase shifted 90° from the voice coil force.On FIG. 24 , the phase was close to 90°. These responses are alsorepresented in the following system of equations:

$\begin{matrix}{{fHz}:={{\left( \frac{\text{.011}}{1} \right)^{- 1}{Hz}} = {90.909{Hz}}}} & (3)\end{matrix}$ $\begin{matrix}{\omega:={f_{Hz} \cdot 2 \cdot \pi}} & (4)\end{matrix}$ $\begin{matrix}{{t:={0s}},{0.0001s\ldots\frac{2}{f_{Hz}}}} & (5)\end{matrix}$ $\begin{matrix}{\phi_{1}:={- 95\deg}} & (6)\end{matrix}$ $\begin{matrix}{\phi_{2}:={5\deg}} & (7)\end{matrix}$ $\begin{matrix}{{\phi_{1} - \phi_{2}} = {- 100\deg}} & (8)\end{matrix}$ $\begin{matrix}{{A_{1}(t)}:={1.3{\sin\left( {\omega \cdot t} \right)}}} & (9)\end{matrix}$ $\begin{matrix}{{A_{2}(t)}:={0.7{\sin\left( {{\omega \cdot t} + \phi_{1}} \right)}}} & (10)\end{matrix}$ $\begin{matrix}{{A_{3}(t)}:={0.5{\sin\left( {{\omega \cdot t} + \phi_{2}} \right)}}} & (11)\end{matrix}$ $\begin{matrix}{{A_{4}(t)}:={0.{\sin\left( {{\omega \cdot t} + \phi_{2}} \right)}}} & (12)\end{matrix}$

FIG. 25 shows power data from the test conducted in FIG. 24 on theschematic of FIG. 23 . For comparison, an off-the-shelf system uses 75Watts for all vacuum values, because it is a rotary piston style and hasa fixed piston displacement. In contrast, the mechanical resonant systemhas variable displacement that can be controlled. After furtherdevelopment, full vacuum will be achieved at various flow rates.

The foregoing description is given for clearness of understanding only,and no unnecessary limitations should be understood therefrom, asmodifications within the scope of the disclosure may be apparent tothose having ordinary skill in the art. Throughout the specification,where compositions are described as including components or materials,it is contemplated that the compositions can also consist essentiallyof, or consist of, any combination of the recited components ormaterials, unless described otherwise. Likewise, where methods aredescribed as including steps, it is contemplated that the methods canalso consist essentially of, or consist of, any combination of therecited steps, unless described otherwise. The disclosure illustrativelydisclosed herein suitably may be practiced in the absence of any elementor step which is not specifically disclosed herein.

The practice of a method disclosed herein, and individual steps thereof,can be performed manually and/or with the aid of or automation providedby electronic equipment. Although processes have been described withreference to embodiments, a person of ordinary skill in the art willreadily appreciate that other ways of performing the acts associatedwith the methods may be used. For example, the order of various of thesteps may be changed without departing from the scope or spirit of themethod, unless described otherwise. In addition, some of the individualsteps can be combined, omitted, or further subdivided into additionalsteps.

It is appreciated that certain features of the invention, which are, forclarity, described in the context of separate embodiments, may also beprovided in combination in a single embodiment. Conversely, variousfeatures of the invention, which are, for brevity, described in thecontext of a single embodiment, may also be provided separately or inany suitable subcombination. All combinations of the embodimentspertaining to the chemical groups represented by the variables containedwithin the generic chemical formulae described herein are specificallyembraced by the present invention just as if each and every combinationwas individually explicitly recited, to the extent that suchcombinations embrace stable compounds (i.e., compounds that can beisolated, characterized and tested for biological activity). Inaddition, all subcombinations of the chemical groups listed in theembodiments describing such variables, as well as all subcombinations ofuses and medical indications described herein, are also specificallyembraced by the present invention just as if each and everysubcombination of chemical groups and subcombination of uses and medicalindications was individually and explicitly recited herein.

All patents, publications and references cited herein are hereby fullyincorporated by reference. In case of conflict between the presentdisclosure and incorporated patents, publications and references, thepresent disclosure should control.

1-13. (canceled)
 14. A method for evacuating a chamber, comprisingoperating a mechanical resonant system in fluid communication with thechamber, the system comprising: a frame comprising a plurality of platesand a plurality of standoffs; at least one pair of pumps disposed onopposite sides of the frame, each of the at least one pair of pumpscomprising a pump head, a piston, and a barrel, wherein each piston isdisposed within each barrel and beneath each pump head; two massesoperatively coupled to the frame by a first plurality of resilientmembers; a second plurality of resilient members coupling the two massesto each other; and at least one voice coil actuator disposed between andcoupled to each of the at least one pair of pumps, the at least onevoice coil actuator comprising a bobbin, a magnet, and a magnet housing;wherein the piston of one pump of the at least one pair of pumps iscoupled to the bobbin, and the piston of another pump of the at leastone pair of pumps is coupled to the magnet housing.
 15. The method ofclaim 14, wherein the system comprises one pair of pumps disposed onopposite sides of the frame, wherein one pump pulls and the other pumppushes.
 16. The method of claim 14, wherein during operation the systemhas a resonance frequency, and when the system is in resonance, theinput force is in phase with of the velocity of each of the two masses.17. A method for compressing air, comprising operating a mechanicalresonant system comprising: a frame comprising a plurality of plates anda plurality of standoffs; at least one pair of pumps disposed onopposite sides of the frame, each of the at least one pair of pumpscomprising a pump head, a piston, and a barrel, wherein each piston isdisposed within each barrel and beneath each pump head; two massesoperatively coupled to the frame by a first plurality of resilientmembers; a second plurality of resilient members coupling the two massesto each other; and at least one voice coil actuator disposed between andcoupled to each of the at least one pair of pumps, the at least onevoice coil actuator comprising a bobbin, a magnet, and a magnet housing;wherein the piston of one pump of the at least one pair of pumps iscoupled to the bobbin, and the piston of another pump of the at leastone pair of pumps is coupled to the magnet housing.
 18. The method ofclaim 17, wherein during operation the system has a resonance frequency,and when the system is in resonance, the input force is in phase with ofthe velocity of each of the two masses.
 19. The method of claim 14,wherein the system comprises two pairs of pumps disposed on oppositesides of the frame.
 20. The method of claim 14, wherein the two massescomprise a mass assembly comprising a mass plate, a plurality ofspacers, and at least one ring.
 21. The method of claim 14, wherein thefirst plurality of resilient members comprises springs.
 22. The methodof claim 14, wherein system further comprises one or more selected fromthe group consisting of a signal generator, oscilloscope, signalconditioner, amplifier, current probe, voltage probe, and accelerometer.23. The method of claim 14, wherein system further comprises a thirdplurality of resilient members disposed between the frame and ground,whereby the frame functions as a third mass in the system.
 24. Themethod of claim 17, wherein the system comprises two pairs of pumpsdisposed on opposite sides of the frame.
 25. The method of claim 17,wherein the two masses comprise a mass assembly comprising a mass plate,a plurality of spacers, and at least one ring.
 26. The method of claim17, wherein the first plurality of resilient members comprises springs.27. The method of claim 17, wherein system further comprises one or moreselected from the group consisting of a signal generator, oscilloscope,signal conditioner, amplifier, current probe, voltage probe, andaccelerometer.
 28. The method of claim 17, wherein system furthercomprises a third plurality of resilient members disposed between theframe and ground, whereby the frame functions as a third mass in thesystem.